Progress in Ningbo CVD large single crystal diamond synthesis technology

Abstract The Functional Carbon Materials Team of the Institute of Materials Technology and Engineering of the Chinese Academy of Sciences aims to achieve the localization and industrialization of diamond precision tools. Recently, it has been in CVD (Chemical-Vapor-Depos...
The “Functional Carbon Materials Team” of the Institute of Materials Technology and Engineering of the Chinese Academy of Sciences aims to achieve the localization and industrialization of diamond precision tools, and recently obtained the synthesis of single crystal diamond by CVD (Chemical-Vapor-Deposition). A breakthrough in progress. The team started from the design and modification of domestic microwave plasma CVD equipment and developed a high-density, high-stability diamond deposition device. Compared with foreign equipment, the cost is reduced to 30%. The team independently developed the diamond growth process, which is a special treatment of the seed crystal, while strictly controlling the growth parameters during the preparation process. Through the application of this process, mass production of colorless transparent CVD single crystal diamond sheets has been realized. The deposition rate can reach 70μm/h under the conditions of only hydrogen and methane, and the rate reaches 150μm/h after the addition of nitrogen. This is also a major breakthrough in domestic equipment.

In addition, the team developed an innovative process that eliminates the unfavorable factors of edge-grown polycrystals by controlling the edge effect of single crystal diamonds, enabling the long-term growth of high-quality, large-size single-crystal diamonds. Conventional methods require multiple cumbersome procedures such as cutting, polishing, and growth, and achieve chemical vapor phase synthesis of 8x8x2 mm3 (2.25 carats) large pieces of diamond single crystal. The above results are being transformed into industrial production, which will provide strong technical support for the development of domestic diamond precision processing tools and even carat-grade transparent diamonds and colored diamond jewelry. (Ningbo Institute of Materials Technology and Engineering)
Carat grade CVD bulk single crystal diamond

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